Thermal Mass Flow Controller, Brooks Instrument

GF040CXXM-0013092C-T2PB S5-XXXXXX-0
Thermal Mass Flow Controller, Brooks Instrument
Gas Generators Flow Controllers
The GF40 Series elastomer sealed mass flow controllers and meters.

  • Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
  • Fast response, Hastelloy sensor
  • Easily accessible diagnostic service port is independent of tool communication
  • Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface

This controller with MultiFlo™ technology provides the good results for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unknown flow measurement and control performance.

The MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime. Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards. Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput. Variety of elastomer seals provide cost performance flexibility across range of applications.

Applications includes solar cell chemical vapor deposition systems, life sciences bioreactors, Vacuum processes, nanotechnology, plasma, glass and web coating systems, excellent option for manifold/gas delivery systems.

Certificaciones: CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing). Safety EN61010-1
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